CONFERENCE PROCEEDINGS
Advanced Search
Dr. Narjes Javaheri
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 26 March 2019 Presentation + Paper
Color mixing in overlay metrology for greater accuracy and robustness
Simon Mathijssen, Marc Noot, Murat Bozkurt, Narjes Javaheri, Reza Hajiahmadi, Antonios Zagaris, Ken Chang, Benny Gosali, Eason Su, Cathy Wang, Arie den Boef, Kaustuve Bhattacharyya, Guo-Tsai Huang, Kai-Hsiung Chen, John Lin
Proceedings Volume 10959, 109591G (2019) https://doi.org/10.1117/12.2514949
KEYWORDS: Overlay metrology, Semiconducting wafers, Diffraction gratings, Scanning electron microscopy, Diffraction, Etching, Target detection, Sensors, Metrology, Switching
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top