Ms. Nataliya Vorbringer-Dorozhovets Profile

Nataliya Vorbringer-Dorozhovets

at Technische Univ Ilmenau

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Author

Publications (9)

Proceedings Article | 26 March 2013 Paper

0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography

Nataliya Vorbringer-Doroshovets, Felix Balzer, Roland Fuessl, Eberhard Manske, Marcus Kaestner, Andreas Schuh, Jens-Peter Zoellner, Manuel Hofer, Elshad Guliyev, Ahmad Ahmad, Tzvetan Ivanov , Ivo Rangelow

Proceedings Volume 8680, 868018 (2013) https://doi.org/10.1117/12.2012324

KEYWORDS: Scanning probe lithography, Lithography, Atomic force microscopy, Nanoelectronics, Optical lithography, Silicon, Inspection, Scanners, Optical alignment, Photomasks

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Proceedings Article | 25 August 2010 Paper

Investigation of the metrological properties of a 3-D microprobe with optical detection system

F. Balzer, N. Hofmann, N. Dorozhovets, T. Hausotte, E. Manske, G. Jäger

Proceedings Volume 7767, 77670V (2010) https://doi.org/10.1117/12.863118

KEYWORDS: Interferometers, Metrology, Optical spheres, Head, Silicon, 3D metrology, Sensors, Beam splitters, Interferometry, Optical components

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Proceedings Article | 22 May 2009 Paper

Monte Carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement

Ph. Kreutzer, N. Dorozhovets, E. Manske, R. Füßl, G. Jäger, R. Grünwald

Proceedings Volume 7378, 737816 (2009) https://doi.org/10.1117/12.821794

KEYWORDS: Metrology, Interferometers, Scanning probe microscopy, Monte Carlo methods, Beam splitters, Mirrors, Scanning probe microscopes, Distance measurement, Thermal modeling, Calibration

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Proceedings Article | 18 June 2007 Paper

Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements

N. Dorozhovets, T. Hausotte, G. Jäger, E. Manske

Proceedings Volume 6616, 661624 (2007) https://doi.org/10.1117/12.726230

KEYWORDS: Metrology, Scanning probe microscopy, Standards development, Calibration, Scanning probe microscopes, Interferometers, Homodyne detection, Atomic force microscopy, Piezoelectric drives, Mirrors

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Proceedings Article | 18 June 2007 Paper

Precision mechatronics based on high-precision measuring and positioning systems and machines

Gerd Jäger, Eberhard Manske, Tino Hausotte, Rostyslav Mastylo, Natalja Dorozhovets, Norbert Hofmann

Proceedings Volume 6616, 661621 (2007) https://doi.org/10.1117/12.732041

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Mechatronics, Nanoprobes, Helium neon lasers, Optical testing, Spatial resolution, Atomic force microscopy

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Proceedings Article | 25 October 2006 Paper

Nanomeasuring and nanopositioning engineering

G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, N. Hofmann

Proceedings Volume 6280, 628001 (2006) https://doi.org/10.1117/12.715237

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Sensor technology, Nanoprobes, Microscopes, Spatial resolution, Optical testing

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Proceedings Article | 14 August 2006 Paper

Development of the interferometrical scanning probe microscope

N. Dorozhovets, T. Hausotte, N. Hofmann, E. Manske, G. Jäger

Proceedings Volume 6293, 629311 (2006) https://doi.org/10.1117/12.680692

KEYWORDS: Scanning probe microscopy, Interferometry, Interferometers, Metrology, Atomic force microscopy, Calibration, Piezoelectric drives, Scanning probe microscopes, Control systems, Beam splitters

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Proceedings Article | 27 April 2006 Paper

Metrological scanning probe microscope

N. Dorozhovets, T. Hausotte, E. Manske, G. Jäger, N. Hofmann

Proceedings Volume 6188, 61880L (2006) https://doi.org/10.1117/12.664407

KEYWORDS: Scanning probe microscopy, Metrology, Interferometers, Atomic force microscopy, Scanning probe microscopes, Piezoelectric drives, Actuators, Control systems, Beam splitters, Microscopes

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Proceedings Article | 31 August 2005 Paper

Application of a positioning and measuring machine for metrological long-range scanning force microscopy

T. Hausotte, G. Jaeger, E. Manske, N. Hofmann, N. Dorozhovets

Proceedings Volume 5878, 587802 (2005) https://doi.org/10.1117/12.620882

KEYWORDS: Atomic force microscopy, Sensors, Interferometers, Calibration, Motion measurement, Head, Metrology, Standards development, Mirrors, Actuators

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Showing 5 of 9 publications

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