Dr. Peng Xu Profile

Dr. Peng Xu

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Proceedings Article | 1 September 2011 Paper

Carbon based micro- and nano-opto-mechanical systems (C-MOMS/NOMS)

Balaji Panchapakesan, Peng Xu, James Loomis

Proceedings Volume 8107, 810708 (2011) https://doi.org/10.1117/12.893794

KEYWORDS: Actuators, Carbon nanotubes, Micromirrors, Graphene, Mirrors, Microelectromechanical systems, Silicon, Nano opto mechanical systems, Optical lithography, Nanowires

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It is highly likely that future micro and nano-mechanical systems will be powered by light. However, the development of such micro and nano-mechanical systems is still in its infancy. Potential advantages include remote triggering and actuation, remote energy transmission, solar energy scavenging for useful work, and wavelength selectivity of actuation. In recent years, carbon based nano-materials such as carbon nanotubes have shown highly interesting optical to mechanical energy conversion. The development of optical to mechanical energy transducing mechanisms into practical applications is still in its infancy. Only a few devices have been reported till date. This paper presents some of the recent developments in the area of nanotube based photomechanical actuators with emphasis on micro and nanooptomechanical systems. Devices namely micro-cantilevers for detection of free PSA, micro-grippers for manipulation of small particles and micro-mirrors for light modulation have been developed that show both translational and rotational actuation. Finally, integrating nanowires on these platforms could lead to the development of nanooptomechanical systems. The future research of such systems and how they can play an integral part in electronics, sensing and actuation by integrating nanotechnology with mechanics, optics and electronics is discussed.o

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