Dr. Philippe Michallon
at Commissariat a l'Energie Atomique
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 23 March 2010 Paper
Proceedings Volume 7636, 763628 (2010) https://doi.org/10.1117/12.851868
KEYWORDS: Diffraction gratings, Extreme ultraviolet, Diffraction, Interferometers, Lithography, Near field diffraction, Photomasks, Extreme ultraviolet lithography, Photons, Interferometry

Proceedings Article | 21 March 2008 Paper
Proceedings Volume 6921, 69213Y (2008) https://doi.org/10.1117/12.771586
KEYWORDS: Extreme ultraviolet, Interferometers, Lithography, Optical design, Extreme ultraviolet lithography, Line edge roughness, Photomasks, Synchrotrons, Light sources, Collimation

Proceedings Article | 21 March 2007 Paper
Sophie Garidel, Marc Zelsmann, Pauline Voisin, Nevine Rochat, Philippe Michallon
Proceedings Volume 6517, 65172C (2007) https://doi.org/10.1117/12.711417
KEYWORDS: Nanoimprint lithography, Liquids, Self-assembled monolayers, Molecules, Fluorine, Atomic force microscopy, Ultraviolet radiation, FT-IR spectroscopy, Lithography, Natural surfaces

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