Dr. Phillip Himmer Profile

Dr. Phillip Himmer

Sr Research & Development Engineer at Stanford Nanofabrication Facility

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Author

Publications (7)

SPIE Journal Paper | 1 October 2009

Feedback-stabilized deformable membrane mirrors for focus control

Sarah Lukes, Phillip Himmer, Eric Moog, Steven Shaw, David Dickensheets

JM3, Vol. 8, Issue 04, 043040, (October 2009) https://doi.org/10.1117/12.10.1117/1.3249659

KEYWORDS: Capacitance, Feedback control, Mirrors, Control systems, Actuators, Microelectromechanical systems, Deformable mirrors, Oscillators, Capacitors, Electrodes

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Proceedings Article | 24 February 2009 Paper

Feedback stabilized deformable membrane mirrors for focus control

Sarah Lukes, Phillip Himmer, Eric Moog, Steven Shaw, David Dickensheets

Proceedings Volume 7208, 72080Q (2009) https://doi.org/10.1117/12.812338

KEYWORDS: Mirrors, Capacitance, Feedback control, Oscillators, Control systems, Actuators, Silicon, Microelectromechanical systems, Deformable mirrors, Capacitors

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Proceedings Article | 24 January 2004 Paper

Dynamic behavior of high-speed silicon nitride deformable mirrors

Phillip Himmer, David Dickensheets

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.525509

KEYWORDS: Mirrors, Monochromatic aberrations, Deformable mirrors, Silicon, Electrodes, Semiconductor lasers, Phase shifts, Etching, Control systems, Wavefronts

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Proceedings Article | 20 January 2003 Paper

Off-axis variable focus and aberration control mirrors

Phillip Himmer, David Dickensheets

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477815

KEYWORDS: Mirrors, Silicon, Monochromatic aberrations, Deformable mirrors, Wavefront aberrations, Electrodes, Off axis mirrors, Wavefronts, Reflectors, Imaging systems

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Proceedings Article | 2 October 2001 Paper

Silicon nitride biaxial pointing mirrors with stiffening ribs

Todd Kaiser, B. Jeffrey Lutzenberger, Robert Friholm, Phillip Himmer, David Dickensheets

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443096

KEYWORDS: Mirrors, Silicon, Etching, Electrodes, Surface micromachining, Optical fibers, Oxides, Reflectivity, Mirror pointing, Metals

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Proceedings Article | 22 August 2000 Paper

Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration

David Dickensheets, Phillip Himmer, Robert Friholm, B. Jeffrey Lutzenberger

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396518

KEYWORDS: Mirrors, Silicon, Etching, Microopto electromechanical systems, Confocal microscopy, Mars, Raman spectroscopy, Electrodes, Monochromatic aberrations, Microscopes

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Proceedings Article | 2 September 1999 Paper

Pixel-by-pixel aberration correction for scanned-beam micro-optical instruments

David Dickensheets, Paul Ashcraft, Phillip Himmer

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361286

KEYWORDS: Monochromatic aberrations, Mirrors, Gold, Aberration correction, Telescopes, Scanners, Wavefronts, Control systems, Reflectivity, Microelectromechanical systems

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Showing 5 of 7 publications

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