In this work, double ring resonator is analyzed with a microfluidic channel, the coupling of light is observed from the bus waveguide to ring waveguide and then to bus waveguide. The light couples inside the ring for some duration of time that is till the length required to circulate inside the ring. The design is simulated in the Lumerical mode solutions, the light source of 1550nm is allowed to pass through the input port of the top bus waveguide. And the same light will be coupled into the ring waveguide and then enters through the bottom bus waveguide at port 3. The designed double ring resonator is placed on a SiO2, the ring and the bus waveguide is of the material silicon. The light couples from the bus waveguide initially and then couples with the ring waveguide. In the double ring resonator structure, the effective refractive index 3.4254 is observed and its group index of 3.5226. The effective index and the group index is calculated at the mode 5, where the light coupling is observed at the two ring waveguide. Later by placing a micro fluidic channel on top of the double ring waveguide the effective refractive index was 3.4168 and its group index was 3.5328. From the length and the FSR, the effective index of 3.4168 and the group index of 3.5328 was calculated, which is desired for the bio sensing application. Hence it was observed an increase in the group index indicates that the proposed design will be useful in bio sensing application and it can be further fabricated for a point of care devices.
An electrostatically actuated MEMS cantilever beam-based waveguide Bragg grating tunable optical filter has been designed and simulated. The tunable filter is obtained by shifting the reflected wavelength of the waveguide Bragg grating located on the electrostatically actuated cantilever beam. An approach to increasing the electrostatic actuation of the beam by having an electrode underneath the beam is used and a large wavelength tuning range for the optical filter is achieved. Dimensions of the device are chosen such that full-width-half-maximum is 0.75 nm, thus capable of filtering adjacent channels of the dense wavelength division multiplexing (DWDM) network. The filter has a tuning range of 10.65 nm (1552.52 to 1563.17 nm) providing add/drop functionality for 14 adjacent DWDM channels.
In this work, a ring resonator is designed with two rings for the sensing application. The waveguide is designed with 400nm wide and 180nm high. Both the rings are designed with 3.1μm radius each. The straight waveguide couples with the ring at 1550nm wavelength. The mode profiles and the spectrum of resonances are observed at mid- infrared wavelength, 1550nm. The measurements of the mode profile, refractive index and spectral properties of the design facilitate to monitor and modify the optical properties of the ring resonator structure. The phase shift in the resonance is observed, which can be implemented in the design of the sensor based ring resonator. In sensing applications the small size of ring resonator plays an important role, the interaction length of ring resonator with few tens of centimeters or even longer gives better sensing performance. Ring resonator offers enhanced light intensity near its surface with the enhancement being proportional to the Q-factor, which is due to the circulating nature of the resonant light. The coupling between the straight waveguide and the ring at 1550nm wavelength and is simulated using Lumerical FDTD. In optical sensors, a thin layer is attached to one of the ring surface, to observe the phase shift in the resonance. Since the refractive index of the thin layer on top of the ring structure is different from the surrounding medium which is typically water based, a change of index happens at the surface of the sensor which is measured for detecting the presence of additional layer in the cover medium. Hence the ring resonator structure can be implemented for bio-sensing application.
In recent years micro-electro-mechanical system (MEMS) sensors have drawn considerable attention due to their attraction in terms of miniaturization, batch fabrication and ease of integration with the required electronics circuitry. Micro-opto-electro-mechanical (MOEM) devices and systems, based on the principles of integrated optics and micromachining technology on silicon have immense potential for sensor applications. Employing optical techniques have important advantages such as functionality, large bandwidth and higher sensitivity. Pressure sensing is currently the most lucrative market for solid-state micro sensors. Pressure sensing using micromachined structures utilize the changes induced in either the resistive or capacitive properties of the electro-mechanical structure by the impressed pressure. Integrated optical pressure sensors can utilize the changes to the amplitude, phase, refractive index profile, optical path length, or polarization of the lightwave by the external pressure. In this paper we compare the performance characteristics of three types of MOEM pressure sensors based on Mach-Zehnder Interferometer (MZI), Directional Coupler (DC) and racetrack resonator (RR) integrated optical geometries. The first two configurations measure the pressure changes through a change in optical intensity while the third one measures the same in terms of frequency or wavelength change. The analysis of each sensors has been carried out in terms of mechanical and optical models and their interrelationship through optomechanical coupling. For a typical diaphragm of size 2mm × 1mm × 20 μm, normalized pressure sensitivity of 18.35 μW/mW/kPa, 29.37 μW/mW/kPa and 2.26 pm/kPa in case of MZI, DC and RR devices have been obtained respectively. The noise performance of these devices are also presented.
The combination of Integrated Optics with micro-mechanical structures on silicon offers immense potential for smart structure applications. One such application is sensing and mapping of vibration and vibrational modes. In the present proposal, a cantilever formed by bulk micro machining of (100). Silicon and optical waveguides formed by sol-gel process is considered. Among the various configurations possible, an optical directional coupler located close to foot of the cantilever is analyzed in detail. Analytical and simulation result using optical coupled mode theory to obtain the power transfer that is dependent on cantilever vibrations are presented.
Combination of Integrated Optics and micro-machining technologies offer immense potential for sensor applications. Small mechanical deformations can often produce considerable changes in optical properties of devices resulting in drastically improved sensitivities. Here we prose and analyze a novel pressure sensor consisting of integrated optic Mach-Zehnder interferometer whose sensing arm is fabricated on a silicon micro-machined diaphragm. The analysis consists of determining the changes in optical output corresponding to the diaphragm deflections due to impressed pressure. Dynamical equations of motion are solved and resulting displacement fields are related to refractive index and optical path length changes of the Mach-Zehnder interferometer. Results can be used to obtain the change in sensitivity due to change sin path length and refractive index variations. The analysis can easily be applied to other MOEM sensor devices like those consisting of micro-machined vibrating cantilevers and bridges controlling optical waveguides, directional couplers or multi-mode-multi-waveguide structures.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.