Mr. Qiang Wu Profile

Qiang Wu

at ICRD

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Publications (2)

Proceedings Article | 22 February 2021 Poster + Paper

A study on diffraction-based overlay measurement based on FDTD method

Buqing Xu, Qiang Wu, Rui Chen, Lisong Dong, Libin Zhang, Yayi Wei

Proceedings Volume 11611, 116113B (2021) https://doi.org/10.1117/12.2581909

KEYWORDS: Overlay metrology, Chemical mechanical planarization, Finite-difference time-domain method, Diffraction, Signal processing, Semiconductor manufacturing, Metrology, Visible radiation, Tolerancing, Reliability

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SPIE Journal Paper | 20 December 2018

Optimized parameters selected on the basis of the development defect model

Ling Ma, Buqing Xu, Qiang Wu, Lisong Dong, Taian Fan, Yuntao Jiang, Yayi Wei

JM3, Vol. 17, Issue 04, 043508, (December 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.4.043508

KEYWORDS: Semiconducting wafers, Lithography, Nitrogen, Photoresist materials, Particles, Microelectronics, Computer simulations, Fluctuations and noise, Semiconductor manufacturing, Polymers

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