Dr. Qing Cao Profile

Dr. Qing Cao

at FernUniv in Hagen

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Proceedings Article | 20 July 2006 Paper

Diffractive nano-focusing and nano-imaging

Qing Cao

Proceedings Volume 6342, 634219 (2006) https://doi.org/10.1117/12.692284

KEYWORDS: Zone plates, Space telescopes, X-ray telescopes, Diffraction, Extreme ultraviolet, Nanoimaging, Microscopes, X-rays, Spatial resolution, Bessel functions

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Diffractive nano-focusing and nano-imaging have many applications in soft X-ray microscopy, spectroscopy, nano-lithography, and in telescope. They can be realized by novel diffractive optical elements of photon sieve and of modified Fresnel zone plates. A photon sieve is composed of a great number of pinholes whose positions and radii are properly chosen. Similarly, a modified Fresnel zone plate is composed of a great number of open rings whose positions and widths are also properly chosen. Recently, an individual far-field model was established to analyse and design a photon sieve. The key point is that the individual diffracted fields of the pinholes have reached their own far fields because the pinholes are very small. Similarly, the individual diffracted fields of the open rings of a modified Fresnel zone plate can be also given in analytical form. Further, we established the equivalent pupil function theory for a general modified Fresnel zone plate. On one hand, one can calculate the focal spot shape of a pre-given modified Fresnel zone plate, and on the other hand, one can design a specific modified Fresnel zone plate to generate a desired focal spot shape.

Proceedings Article | 20 January 2006 Paper

Photon sieves and modified Fresnel zone plates

Qing Cao, Juergen Jahns

Proceedings Volume 6027, 602702 (2006) https://doi.org/10.1117/12.667697

KEYWORDS: Zone plates, Extreme ultraviolet, X-rays, Lenses, X-ray imaging, Diffraction, Spatial resolution, Lithography, Diffractive optical elements, Ultraviolet radiation

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Traditional Fresnel zone plates (TFZPs) can be used for the focusing and imaging of soft X-rays and extreme ultraviolet (EUV) radiations. However, the focal spot size of a TFZP is limited in technology by the minumum feature size (20-40 nm) that can be fabricated by lithography. Recently, a novel diffractive optical element called a photon sieve, which consists of a great number of pinholes properly distributed over the Fresnel zone, was proposed to overcome the resolution problem of a TFZP. Following the initial Nature paper, we have presented the simple individual far-field model for photon sieves and established the general theory for various modified FZPs. Here we present an overview of our research work in these areas. The related contents include the analytical descriptions for the diffracted fields of the individual pinholes and of the individual open rings, the selection conditions for the pinholes and for the open rings, the suppression of sidelobes, the physical limit of the resolution, the suppression of higher-order foci, the construction of a specific focal spot shape like a Gaussian focal spot, the equivalent pupil (or aperture) function theory, the diffraction efficiency, and the fast computation method for the individual diffracted fields. We also discuss the extension of the equivalent pupil function theory to apodized multilevel diffractive lenses.

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