Mr. Robin D. Buijs Profile

Robin D. Buijs

at ASML Netherlands BV

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Publications (1)

Proceedings Article | 22 August 2020 Presentation

A library-based approach to super resolution metrology and localization without imaging

Femius Koenderink, R. D. Buijs, T. Wolterink, Nick Schilder, E. Verhagen

Proceedings Volume 11462, 1146208 (2020) https://doi.org/10.1117/12.2568088

KEYWORDS: Plasmons, Antennas, Super resolution, Metrology, Spatial resolution, Light scattering, Wavefronts, Diffraction, Image resolution, Scattering

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