Mr. Regis Vanderhaghen Profile

Regis Vanderhaghen

at Ecole Polytechnique

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Author

Publications (5)

Proceedings Article | 1 July 2003 Paper

Noninvasive electrical characterization of semiconductor at bulk and interfaces

Regis Vanderhaghen, Samir Kasouit, Bernard Drevillon, Virginia Chu, Joao Conde, Hyunjong Kim, Jean Paul Kleider

Proceedings Volume 4999, (2003) https://doi.org/10.1117/12.482505

KEYWORDS: Interfaces, Silicon, Semiconductors, Diffusion, Microwave radiation, Ellipsometry, Ultraviolet radiation, Pulsed laser operation, Thin films, Crystals

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Proceedings Article | 16 May 2003 Paper

Low-temperature plasma-deposited microcrystalline silicon thin films: an emerging material for stable thin film transistors

Pere Roca i Cabarrocas, Samir Kasouit, B. Kalache, Regis Vanderhaghen, Y. Bonnassieux, M. Elyaakoubi, I. French

Proceedings Volume 5004, (2003) https://doi.org/10.1117/12.476827

KEYWORDS: Microcrystalline materials, Silicon, Silicon films, Hydrogen, Crystals, Plasma, Interfaces, Glasses, Thin films, Transistors

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Proceedings Article | 21 May 2002 Paper

Noninvasive electrical characterization of semiconductor and interface

Samir Kasouit, Bernard Drevillon, Joao Conde, Hyun Jong Kim, Jean Paul Kleider, Regis Vanderhaghen

Proceedings Volume 4650, (2002) https://doi.org/10.1117/12.467666

KEYWORDS: Interfaces, Semiconductors, Microwave radiation, Diffusion, Silicon, Ellipsometry, Thin films, Pulsed laser operation, Silicon films, Crystals

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Proceedings Article | 24 April 1995 Paper

Modulated photoellipsometry measurements of GaAs internal field

Regis Vanderhaghen, S. Cueille, Bernard Drevillon, Razvigor Ossikovski

Proceedings Volume 2397, (1995) https://doi.org/10.1117/12.206863

KEYWORDS: Modulation, Gallium arsenide, Dielectrics, Spectroscopes, Ellipsometry, Phase shift keying, Polarization, Laser beam diagnostics, Semiconductor characterization, Optical components

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Proceedings Article | 21 October 1992 Paper

Ultrafast thermal nonlinearities in amorphous silicon

Philippe Fauchet, Daniele Hulin, A. Mourchid, Regis Vanderhaghen

Proceedings Volume 1677, (1992) https://doi.org/10.1117/12.137681

KEYWORDS: Picosecond phenomena, Absorption, Scattering, Electrons, Semiconductors, Crystals, Amorphous silicon, Amorphous semiconductors, Temperature metrology, Ultrafast phenomena

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