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Richard Lewington
Sales Representative at Applied Materials Inc
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Publications (1)
Proceedings Article | 20 May 2006 Paper
Mask etcher data strategy for 45 nm and beyond
Richard Lewington, Ibrahim Ibrahim, Sheeba Panayil, Ajay Kumar, John Yamartino
Proceedings Volume 6283, 62831W (2006) https://doi.org/10.1117/12.681760
KEYWORDS: Sensors, Etching, Data acquisition, Photomasks, Principal component analysis, Data mining, Statistical analysis, Interfaces, Zoom lenses, Process control
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