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Robert D. Frankel
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Publications (4)
Proceedings Article | 26 March 2007 Paper
Quantum state control interference lithography and trim double patterning for 32-16-nm lithography
Proceedings Volume 6520, 65202L (2007) https://doi.org/10.1117/12.717731
KEYWORDS: Lithography, Double patterning technology, Stimulated emission depletion microscopy, Interferometry, Optical lithography, Diffraction, Photoresist materials, Diffraction gratings, Microscopy, Deep ultraviolet
Proceedings Article | 29 December 2003 Paper
Low-polarization-dependence high-efficiency WDM
Evgeny Popov, John Hoose, Robert Frankel, C. Keast, M. Fritze, T. Fan, D. Yost, S. Rabe
Proceedings Volume 5184, (2003) https://doi.org/10.1117/12.504701
KEYWORDS: Silicon, Polarization, Diffraction gratings, Manufacturing, Etching, Wavelength division multiplexing, Diffraction, Crystals, Optical design, Aluminum
Proceedings Article | 24 June 1993 Paper
Development of a polycapillary collimator for point-source x-ray lithography
Michael Vartanian, David Gibson, Robert Frankel, Jerry Drumheller
Proceedings Volume 1924, (1993) https://doi.org/10.1117/12.146531
KEYWORDS: X-rays, Collimators, X-ray lithography, Semiconducting wafers, X-ray sources, Capillaries, Collimation, Printing, Plasma, Lithography
Proceedings Article | 1 May 1990 Paper
Defect printability for soft x-ray microlithography
Darryl Peters, Bernard Dardzinski, Robert Frankel
Proceedings Volume 1263, (1990) https://doi.org/10.1117/12.20149
KEYWORDS: Reticles, X-rays, X-ray lithography, Latex, X-ray technology, Absorption, Lithography, Gold, Optical lithography, Scanning electron microscopy
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