Dr. Romolo Marcelli Profile

Dr. Romolo Marcelli

Head at Istituto per la Microelettronica e Microsistemi

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Publications (9)

Proceedings Article | 21 May 2015 Paper

Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications

Fabio Quaranta, Anna Persano, Giovanni Capoccia, Antonietta Taurino, Adriano Cola, Pietro Siciliano, Andrea Lucibello, Romolo Marcelli, Emanuela Proietti, Alvise Bagolini, Benno Margesin, Pierluigi Bellutti, Jacopo Iannacci

Proceedings Volume 9517, 95170S (2015) https://doi.org/10.1117/12.2179867

KEYWORDS: Switches, Bridges, Microelectromechanical systems, Actuators, Gold, Metals, K band, Silicon, Dielectrics, Lithography

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Proceedings Article | 5 May 2011 Paper

Development of capacitive RF MEMS switches with TaN and Ta2O5 thin films

Anna Persano, Fabio Quaranta, Adriano Cola, Giorgio De Angelis, Romolo Marcelli, Pietro Siciliano

Proceedings Volume 8066, 80660V (2011) https://doi.org/10.1117/12.886715

KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Bridges, Thin films, Tantalum, Capacitance, Sputter deposition, Device simulation, Electrodes

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Proceedings Article | 27 August 2005 Paper

Non-destructive optical system based on digital holographic microscope for quasi real-time characterization of micromechanical shunt switch

Valerio Striano, Giuseppe Coppola, Pietro Ferraro, Domenico Alfieri, Sergio De Nicola, Andrea Finizio, Giovanni Pierattini, Romolo Marcelli, Paolo Mezzanotte

Proceedings Volume 5858, 585815 (2005) https://doi.org/10.1117/12.612746

KEYWORDS: Switches, Bridges, Digital holography, Microelectromechanical systems, Holograms, Dielectrics, Holography, Diffraction, Microscopes, Inspection

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Proceedings Article | 16 August 2004 Paper

Modeling of microstrip lines on micromachined silicon substrates

Alina Cismaru, Romolo Marcelli, George Sajin, Florea Craciunoiu

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545541

KEYWORDS: Silicon, Resonators, Microwave radiation, Transducers, Semiconducting wafers, Modeling, Micromachining, Aluminum, Anisotropic etching, Device simulation

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Proceedings Article | 16 January 2003 Paper

Bandstop magnetostatic wave resonators on micromachined silicon membrane

Romolo Marcelli, George Sajin, Florea Craciunoiu, Alina Cismaru

Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.473375

KEYWORDS: Resonators, Silicon, Magnetism, Microwave radiation, Semiconducting wafers, Etching, Oscillators, Photoresist materials, Garnet, Oxides

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Proceedings Article | 1 October 2001 Paper

Magnetostatic straight edge resonators on micromachined silicon membrane

George Sajin, Romolo Marcelli

Proceedings Volume 4559, (2001) https://doi.org/10.1117/12.443034

KEYWORDS: Silicon, Resonators, Transducers, Microwave radiation, Tunable filters, Magnetism, Micromachining, Microtechnology, Microsystems, Silicon films

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Proceedings Article | 10 March 1999 Paper

Microwave planar lumped circuit elements on micromachined thin dielectric membranes

Sergiu Iordanescu, Alexandru Mueller, Romolo Marcelli, G. Bartolucci, Ioana Petrini, Dan Vasilache, Viorel Avramescu

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341192

KEYWORDS: Dielectrics, Manufacturing, Gallium arsenide, Capacitors, Inductance, Microwave radiation, Silicon, Semiconducting wafers, Chemical elements, Capacitance

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Proceedings Article | 5 September 1997 Paper

10-um thin GaAs membrane manufactured by nonselective etching

Alexandru Mueller, Ioana Petrini, Viorel Avramescu, Sergiu Iordanescu, Romolo Marcelli, Vittorio Foglietti, M. Dragoman

Proceedings Volume 3223, (1997) https://doi.org/10.1117/12.284482

KEYWORDS: Etching, Gallium arsenide, Manufacturing, Microwave radiation, Temperature sensors

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Proceedings Article | 25 August 1994 Paper

Resonant interaction between microwave and optical signals in magnetostatic wave resonating filters

Romolo Marcelli, Su Jun, Paolo De Gasperis

Proceedings Volume 2212, (1994) https://doi.org/10.1117/12.185136

KEYWORDS: Microwave radiation, Magnetism, Optical filters, Resonators, Garnet, Electronic filtering, Waveguides, Wave propagation, Filtering (signal processing), Modulation

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Showing 5 of 9 publications

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