Dr. Satoru Odate Profile

Dr. Satoru Odate

at Nikon Corp

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Publications (5)

Proceedings Article | 4 October 2024 Presentation + Paper

Fabrication of superconducting quantum circuits on 12-inch wafers using an ArF immersion lithography system Ⅱ

Satoru Odate, Naooki Saito, Hajime Aoyama, Koichi Kusuyama, Yasunobu Nakamura, Hiroyuki Tsukamoto

Proceedings Volume 13115, 1311508 (2024) https://doi.org/10.1117/12.3027297

KEYWORDS: Semiconducting wafers, Fabrication, Immersion lithography, Superconductors, Aluminum, Sputter deposition, Quantum circuits, Optical alignment, Quantum systems, Silicon

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Proceedings Article | 28 May 2024 Open Access

Development of a highly-sensitive interferometer for laser ultrasonic testing of minute defects in metal materials

Kazunori Miyata, Satoshi Yashiki, Yuki Kamei, Fuyuhiko Inoue, Satoru Odate, Yasuko Yamasaki, Ryosuke Doi, Yuichi Takigawa

Proceedings Volume 13083, 130830J (2024) https://doi.org/10.1117/12.3027477

KEYWORDS: Sagnac interferometers, Laser ultrasonics, Stray light, Signal to noise ratio, Interference (communication), Receivers, Metals, Head, Ultrasonics, Defect detection

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Proceedings Article | 5 October 2023 Presentation + Paper

Fabrication of superconducting quantum circuits on 12-inch wafers using an ArF immersion lithography system

Satoru Odate, Naooki Saito, Kosuke Suzuki, Hajime Aoyama, Koichi Kusuyama, Yasunobu Nakamura, Hiroyuki Tsukamoto

Proceedings Volume 12652, 1265205 (2023) https://doi.org/10.1117/12.2675964

KEYWORDS: Immersion lithography, Superconductors, Fabrication, Semiconducting wafers, Quantum circuits, Quantum communications, Resonators, Quantum systems, Quantum numbers, Quantum computers

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Proceedings Article | 3 October 2017 Presentation

Direct laser writing of carbon nanotubes (Conference Presentation)

Kentaro Yamada, Makoto Nakazumi, Satoru Odate, Koichiro Iwahori

Proceedings Volume 10354, 103540N (2017) https://doi.org/10.1117/12.2272108

KEYWORDS: Carbon nanotubes, Transistors, Fabrication, Coating, Glasses, Multiphoton lithography, Nanolithography, Electronic components, Single walled carbon nanotubes, Objectives

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Proceedings Article | 27 September 2013 Paper

Wide field snapshot imaging polarimeter using modified Savart plates

Naooki Saito, Satoru Odate, Katsura Otaki, Masahiro Kubota, Rintaro Kitahara, Kazuhiko Oka

Proceedings Volume 8873, 88730M (2013) https://doi.org/10.1117/12.2022829

KEYWORDS: Polarimetry, Polarization, Surface plasmons, Calibration, Imaging systems, Distortion, Crystals, Prototyping, Optical design, Geometrical optics

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