A new type of spectroscopic ellipsometry is proposed for imaging optical properties of non-uniform thin films.
Unlike conventional spectroscopic ellipsometers, the ellipsometer is neither based on a monochromator nor a
spectrometer. By using broad-band light source and white-light interference technique, the ellipsometry system
efficiently illuminates the sample and enables us to detect reflected light with a CCD or CMOS image sensor.
Therefore fast imaging ellipsometry is realized over wide spectral range. In this study, we built simple imaging
ellipsometer based on P-S-A (polarizer-sample-analyzer) configuration and show fundamental experimental
results.
White-light scanning interferometry is a powerful technique for three-dimensional (3D) shape measurements of
optical devices, industrial parts and microstructures. In order to obtain high performance out of this technique,
many algorithms have been proposed such as phase-shifting, zero-crossing and Fourier-transform based methods.
However, all of these algorithms require that the interferogram be sampled over a wide range. Unlike these
conventional techniques, we here propose a weighted integral method that gives an estimate of the envelope peek
position from only a fraction of the interferogram.
We propose a new out-of-plane vibration imaging technique for
micro-structured solid-state devices such as MEMS (microelectro mechanical systems) microphones and resonators. This technique is based on the longitudinally scanning optical interferometry and an integrated image sensor device which we call the correlation image sensor (CIS). The CIS is able to extract an arbitrary frequency component from time-varying incident light and produce a complex correlation image including amplitude and phase in addition to a conventional intensity image. In heterodyne interferometry of vibrating objects, the vibration information is encoded in several frequency components generated by mutual modulation of longitudinal scan and vibration. In this paper, the combination of newly developed multi-channel CIS and the scanning heterodyne technique enable us to obtain the multiple frequency components simultaneously and reconstruct the vibration amplitude and phase distributions in real time. As an example, vibration modes of a MEMS acoustic sensor are shown to be rconstructed at video rate. A theoretical possiblitiy for the imaging of higher than GHz vibration combining other optical heterodyne techniques is also discussed.
Multi-axis displacement sensing technique with a single optical beam is proposed. Our system consists of propagating optical vortex beam and its imaging system. Since optical vortex beam have feature points known as zero-points or phase singularities in its beam profile,
we can detect lateral and rotational displacement of the beam precisely by imaging and tracking the points. Unlike conventional laser displacement sensing techniques, our measurement scheme can be applied for the deformation sensing of civil infrastructures such as bridges and highways where triangulations can not be applied.
The basic optical setup is presented and the results of the fundamental experiments are shown.
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