Mr. Shang-Jung Wu Profile

Shang-Jung Wu

at Taiwan Semiconductor Manufacturing Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 April 2023 Presentation

Danping Peng, Shang-Jung Wu, Jue-Chin Yu, Chia-Hua Chang, Kenneth Ho

Proceedings Volume 12495, 124950I (2023) https://doi.org/10.1117/12.2661726

KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Data processing, Lithography, Inspection, Image processing

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Keywords/Phrases