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Shuhan Wang
at Institute of Microelectronics CAS
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Publications (4)
SPIE Journal Paper | 22 November 2021
Hotspot detection in large-scale layout with proposal sampling and feature parameters optimization
Tianyang Gai, Ying Chen, Xiaojing Su, Tong Qu, Shuhan Wang, Yajuan Su, Yayi Wei
JM3, Vol. 20, Issue 04, 041208, (November 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.4.041208
KEYWORDS: Feature extraction, Sensors, Lithography, Data modeling, Convolution, Performance modeling, Neural networks, Visualization, Machine learning, Image processing
Proceedings Article | 12 October 2021 Presentation + Paper
Litho-aware redundant local-loop insertion framework with convolutional neural network
Tong Qu, Yibo Lin, Tianyang Gai, Xiaojing Su, Shuhan Wang, Bojie Ma, Yajuan Su, Yayi Wei
Proceedings Volume 11855, 118550L (2021) https://doi.org/10.1117/12.2601685
KEYWORDS: Lithography, Convolutional neural networks, Computer simulations, Neural networks
SPIE Journal Paper | 15 July 2021
Data augmentation in hotspot detection based on generative adversarial network
Shuhan Wang, Tianyang Gai, Tong Qu, Bojie Ma, Xiaojing Su, Lisong Dong, Libin Zhang, Peng Xu, Yajuan Su, Yayi Wei
JM3, Vol. 20, Issue 03, 034201, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.034201
KEYWORDS: Gallium nitride, Data modeling, Performance modeling, Binary data, Machine learning, Statistical modeling, Lithography, Convolution, Computer programming, Microelectronics
Proceedings Article | 22 February 2021 Presentation + Paper
Multi-level layout hotspot detection based on multi-classification with deep learning
Tianyang Gai, Tong Qu, Xiaojing Su, Shuhan Wang, Lisong Dong, Libin Zhang, Rui Chen, Yajuan Su, Yayi Wei, Tianchun Ye
Proceedings Volume 11614, 116140W (2021) https://doi.org/10.1117/12.2583726
KEYWORDS: Data modeling, Neural networks, Sensors, Performance modeling, Optics manufacturing, Machine learning, Lithography, Convolutional neural networks, Yield improvement, Statistical modeling
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