Dr. Shuichi Torii Profile

Dr. Shuichi Torii

at Univ of Tsukuba

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 9 May 2013 Paper

Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas

Tetsuya Makimura, Shuichi Torii, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami

Proceedings Volume 8777, 877706 (2013) https://doi.org/10.1117/12.2019048

KEYWORDS: Extreme ultraviolet, Silica, Laser ablation, Plasmas, Polymethylmethacrylate, Glasses, Micromachining, Mirrors, Zirconium, Ions

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Proceedings Article | 12 January 2012 Paper

Silica ablation process induced by focused laser plasma soft x-rays

Tetsuya Makimura, Shuichi Torii, Hiroyuki Niino, Kouichi Murakami

Proceedings Volume 8206, 82061D (2012) https://doi.org/10.1117/12.911978

KEYWORDS: Silica, X-rays, Glasses, Laser ablation, Ions, Plasma, Mirrors, X-ray lasers, Tantalum, Diffusion

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Proceedings Article | 19 May 2011 Paper

Micromachining of polydimethylsiloxane induced by laser plasma EUV light

S. Torii, T. Makimura, K. Okazaki, D. Nakamura, A. Takahashi, T. Okada, H. Niino, K. Murakami

Proceedings Volume 8077, 807714 (2011) https://doi.org/10.1117/12.887384

KEYWORDS: Extreme ultraviolet, Plasma, Micromachining, Laser ablation, Pulsed laser operation, Mirrors, Nd:YAG lasers, Zirconium, Optical filters, Microfluidics

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Proceedings Article | 19 May 2011 Paper

Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining

Tetsuya Makimura, Shuichi Torii, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Hiroyuki Niino, Tatsuo Okada, Kouichi Murakami

Proceedings Volume 8077, 80770F (2011) https://doi.org/10.1117/12.887615

KEYWORDS: Extreme ultraviolet, Polymethylmethacrylate, Plasma, Laser ablation, Zirconium, Micromachining, Optical filters, Tantalum, Nd:YAG lasers, Xenon

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