CONFERENCE PROCEEDINGS
Advanced Search
Shunho Yang
at HamaTech APE GmbH & Co KG
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 11 May 2007 Paper
Qualification of design-optimized multizone hotplate for 45-nm node mask making
Proceedings Volume 6607, 66070D (2007) https://doi.org/10.1117/12.728926
KEYWORDS: Sensors, Temperature metrology, Critical dimension metrology, Photomasks, Optimization (mathematics), Chemically amplified resists, Temperature sensors, Mask making, Control systems, Lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top