Dr. Shuxian Susan Hu Profile

Dr. Shuxian Susan Hu

Senior CAE

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Publications (2)

Proceedings Article | 9 November 2005 Paper

A simulation-based defect disposition flow for incoming mask quality assurance

Don Lee, Brian Chu, T.Y. Fang, W.B. Shieh, Susan Hu, Jiunn-Hung Chen, Ray Morgan

Proceedings Volume 5992, 59925D (2005) https://doi.org/10.1117/12.632241

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Defect inspection, Computer simulations, Optical lithography, Printing, Optical proximity correction, Resolution enhancement technologies, Manufacturing

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Proceedings Article | 5 November 2005 Paper

Simulation-based photomask qualification using i-Virtual Stepper

Darren Taylor, Ray Morgan, Susan Hu

Proceedings Volume 5992, 599217 (2005) https://doi.org/10.1117/12.634666

KEYWORDS: Photomasks, Semiconducting wafers, Inspection, Manufacturing, Lithography, Binary data, Reticles, Computer simulations, Phase shifting, Etching

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