Mr. Shuyi Gan Profile

Shuyi Gan

at Univ of Science and Technology of China

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Publications (2)

Proceedings Article | 4 January 2008 Paper

Simulation of optical surfaces and their PSD study

Shuyi Gan, Yinhe Bao, Yilin Hong, Xiangdong Xu, Ying Liu, Shaojun Fu

Proceedings Volume 6831, 68310G (2008) https://doi.org/10.1117/12.757332

KEYWORDS: Atomic force microscopy, Particles, Surface roughness, Spatial frequencies, Optical simulations, Optical components, Synchrotron technology, Mechanical engineering, Reflectivity, Scattering

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Proceedings Article | 27 November 2007 Paper

Comparative study of surface roughness with power spectral density and multifractal spectrum

Shuyi Gan, Qing Zhou, Yilin Hong, Xiangdong Xu, Ying Liu, Hongjun Zhou, Tonglin Huo, Shaojun Fu

Proceedings Volume 6723, 67232R (2007) https://doi.org/10.1117/12.783328

KEYWORDS: Surface roughness, Atomic force microscopy, Silicon, Spatial frequencies, Glasses, Data acquisition, Probability theory, Spectral data processing, Silica, Semiconducting wafers

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