Dr. Sung-Jin Park Profile

Dr. Sung-Jin Park

Adjunct Professor at Univ of Illinois at Urbana-Champaign

SPIE Involvement:

Conference Program Committee | Author

Proceedings Article | 4 October 2024 Presentation

Harnessing deep UV and VUV microplasma photonics for emerging applications in atomic clocks, microfabrication processes, and air disinfection

Sung-Jin Park

Proceedings Volume PC13115, PC131150D (2024) https://doi.org/10.1117/12.3028359

KEYWORDS: Microplasma, Deep ultraviolet, Vacuum ultraviolet, Photonics, Microfabrication, Photons, Atomic clocks, Lamps, Plasma generation, Pathogens

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Proceedings Article | 4 October 2022 Presentation

Far UV-C 222nm microplasma flat lamp: its performance and applications as a new inactivation tool of airborne pathogens with human safety (Conference Presentation)

Sung-Jin Park

Proceedings Volume PC12201, PC122010A (2022) https://doi.org/10.1117/12.2633915

KEYWORDS: Lamps, Safety, Pathogens, Ultraviolet radiation, Skin, Photons, Excimers

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Proceedings Article | 1 August 2021 Presentation

Eco-friendly 3D micromachining of polymers by 172 nm photoablation for optical and microfluidics applications

Andrey Mironov, Sehyun Park, Thomas Reboli, Jinhong Kim, Dane Sievers, Sung-Jin Park, James Eden

Proceedings Volume 11801, 1180103 (2021) https://doi.org/10.1117/12.2594868

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Proceedings Article | 5 March 2021 Presentation

Fabrication of optical components and micro- and nanofluidic devices in polymers by 172 nm direct photoablation

Andrey Mironov, Jinhong Kim, Austin Steinforth, Sehyun Park, Dane Sievers, Sung-Jin Park, James Eden

Proceedings Volume 11696, 116960K (2021) https://doi.org/10.1117/12.2583254

KEYWORDS: Polymers, Optical components, Vacuum ultraviolet, Polymethylmethacrylate, Photosensitive materials, Lamps, Excimers, Excimer lasers, Clean room processes

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Proceedings Article | 10 March 2020 Presentation

172 nm patterning of optical components on polymers (Conference Presentation)

Andrey Mironov, Dane Sievers, Austin Steinforth, Jinhong Kim, Sung-Jin Park, James Eden

Proceedings Volume 11292, 112920T (2020) https://doi.org/10.1117/12.2546426

KEYWORDS: Polymers, Optical components, Optical lithography, Lamps, Vacuum ultraviolet, Excimer lasers, Cornea, Optical microcavities, Plasmas, Molecules

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Proceedings Article | 9 September 2019 Presentation

Photo-ablation lithographic technique at 172 nm based upon flat excimer lamps (Conference Presentation)

Andrey Mironov, Dane Sievers, Jinhong Kim, Sung-Jin Park, James Eden

Proceedings Volume 11086, 110860M (2019) https://doi.org/10.1117/12.2529538

KEYWORDS: Lamps, Lithography, Excimers, Photoresist materials, Photoresist developing, Electron beam lithography, Polymers, Photomasks, Electron beams, Polymethylmethacrylate

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Proceedings Article | 17 September 2018 Presentation

Flat microplasma UV lighting tiles: efficient VUV, UV-C, and UV-B generation for various industrial and emerging applications (Conference Presentation)

Sung-Jin Park

Proceedings Volume 10727, 107270L (2018) https://doi.org/10.1117/12.2320250

KEYWORDS: Ultraviolet radiation, Light sources and illumination, Vacuum ultraviolet, Lamps, Optical microcavities, Plasmas, Light, Chemical reactions, Light sources, Mercury

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Proceedings Article | 30 April 2007 Paper

Versatile plasma display technology for UV-visible scene projector

Robert Ginn, Steven Solomon, Sung-Jin Park, J. Eden, Jeff Guy, Ed Peters

Proceedings Volume 6544, 65440F (2007) https://doi.org/10.1117/12.720337

KEYWORDS: Optical spheres, Optical microcavities, Spectroscopy, Ultraviolet radiation, Avalanche photodetectors, Electronics, Projection systems, Argon, Plasma, Cameras

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Showing 5 of 8 publications

Conference Committee Involvement (7)

UV and Higher Energy Photonics: From Materials to Applications 2025

3 August 2025 | San Diego, California, United States

UV and Higher Energy Photonics: From Materials to Applications 2024

18 August 2024 | San Diego, California, United States

UV and Higher Energy Photonics: From Materials to Applications 2023

20 August 2023 | San Diego, California, United States

UV and Higher Energy Photonics: From Materials to Applications 2022

21 August 2022 | San Diego, California, United States

UV and Higher Energy Photonics: From Materials to Applications 2021

2 August 2021 | San Diego, California, United States

Showing 5 of 7 Conference Committees

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