White light interferometry (WLI) is the 3D imaging sensor based on interferometry to obtain depth information by acquiring constructive interference. It allows a deep scanning range in high resolution while there are still limitations that lead to a low imaging speed and vibration from the mechanical movement. In this study, we resolved the vibration problem by isolating the depth scanning part in the tunable-path-difference source (TPDS) with a fiber stretcher from the interferometric measurement part. We also applied line-field interferometry to improve scanning speed and to image not only flat surfaces but also curved objects in variable fields of view.
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