Dr. Syed Shoaib Hasan Zaidi Profile

Dr. Syed Shoaib Hasan Zaidi

at Infineon Technologies AG

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 2 June 2003 Paper

FTIR based nondestructive method for metrology of depths in poly silicon-filled trenches

Shoaib Zaidi, George Stojakovic, Alois Gutmann, Cornel Bozdog, Ulrich Mantz, Sylvie Bosch Charpenay, Peter Rosenthal

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.484998

KEYWORDS: FT-IR spectroscopy, Semiconducting wafers, Metrology, Scanning electron microscopy, Etching, Nondestructive evaluation, Silicon, Reflectivity, Infrared radiation, Transistors

Read Abstract +

Proceedings Article | 7 July 1997 Paper

Scatterometric process monitor for silylation

Shoaib Zaidi, John McNeil, S. Sohail Naqvi

Proceedings Volume 3050, (1997) https://doi.org/10.1117/12.275915

KEYWORDS: Semiconducting wafers, Diffraction, Diffraction gratings, Scatterometry, Manufacturing, Image processing, Sensors, Photoresist materials, Metrology, Process control

Read Abstract +

Proceedings Article | 1 May 1994 Paper

Metrology sensors for advanced resists

Shoaib Zaidi, Steven Prins, John McNeil, S. Sohail Naqvi

Proceedings Volume 2196, (1994) https://doi.org/10.1117/12.174159

KEYWORDS: Metrology, Sensors, Semiconducting wafers, Scatterometry, Light scattering, Nondestructive evaluation, Chemically amplified resists, Critical dimension metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years