Prof. Tetsuya Goto Profile

Prof. Tetsuya Goto

at Tohoku Univ

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 17 March 2023 Poster + Paper

Yoshiaki Kakimoto, Keita Katayama, Takuma Yasunami, Tetsuya Goto, Daisuke Nakamura, Hiroshi Ikenoue

Proceedings Volume 12408, 124080M (2023) https://doi.org/10.1117/12.2651419

KEYWORDS: Silicon carbide, Laser irradiation, Doping, Resistance, Nitrogen, Excimer lasers, Diffusion, Surface roughness, Fabrication, Silicon

Proceedings Article | 5 March 2021 Presentation + Paper

Akira Mizutani, Fuminobu Hamano, Keita Katayama, Daisuke Nakamura, Tetsuya Goto, Hiroshi Ikenoue

Proceedings Volume 11673, 1167306 (2021) https://doi.org/10.1117/12.2579492

KEYWORDS: Transistors, Silicon films, Annealing, Silicon, Optical microscopes, Image quality, Excimer lasers, Crystals, Amorphous silicon, Thin films

Proceedings Article | 22 January 2020 Presentation + Paper

Fuminobu Hamano, Akira Mizutani, Kaname Imokawa, Daisuke Nakamura, Tetsuya Goto, Hiroshi Ikenoue

Proceedings Volume 11268, 1126810 (2020) https://doi.org/10.1117/12.2544910

KEYWORDS: Thin films, Annealing, Excimer lasers, Crystals, Laser irradiation, Radium, Thin film devices, Transistors, Switching, Flat panel displays

Proceedings Article | 4 March 2019 Presentation + Paper

Kaname Imokawa, Nozomu Tanaka, Akira Suwa, Daisuke Nakamura, Taizoh Sadoh, Tetsuya Goto, Hiroshi Ikenoue

Proceedings Volume 10906, 109060J (2019) https://doi.org/10.1117/12.2509141

KEYWORDS: Silicon, Doping, Excimer lasers, Transistors, Phosphorus, Amorphous silicon, Thin films, Pulsed laser operation, Electrodes, Coating

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases