The stability and durability of micro-nano structures is the key to influence the structural materials surface towards practical engineering applications. In this paper, the stability of micro-nano structures fabricated by femtosecond laser is systematically studied. It is found that the hierarchical micro-nano hybrid structures seriously affect absorbing properties and stability of the material surface due to the poor crystallinity. In order to enhance efficient optical absorption and stability, the annealing method is applied to further crystallization of the micro-nano structures. As a result, hierarchical micro-nano hybrid structures with large depth-to-width ratios are fabricated. The experimental results demonstrate that an average reflectance of 3.43% is realized in the waveband of 300-2400nm, and the reduction rate of the reflectance reaches 39.6%. Meanwhile, the water jet impact experiment verifies that the stability of the structure is further improved.
Reducing the reflection of silicon surface is an effective way to enhance its optical absorption performance in optical and optoelectronic devices. In this paper, the influence mechanism of heat accumulation effect existing in the material substrate on the multi-scale porosity properties of surface structure during femtosecond laser irradiation is investigated. Micro-nano structures will lose their multi-scale porous properties at high-repetition-rate laser irradiation due to excessive agglomeration, nucleation or melting. By rapidly cooling the material substrate, the porosity of surface micro-nano structure are optimized, and the antireflection performance of the material surface is improved obviously. Our study opens a novel and convenient route for preparation of broadband antireflective black silicon surfaces for various applications.
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