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Toshiyuki Yokosuka
Researcher at Hitachi Ltd.
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Publications (4)
Proceedings Article | 10 April 2024 Poster + Paper
Study on a charging control method with a high current and large field of view
Proceedings Volume 12955, 1295520 (2024) https://doi.org/10.1117/12.3007173
KEYWORDS: Electric fields, Selenium, Monte Carlo methods, Tunable filters, Statistical analysis, Scanning electron microscopy, Inspection, Sensors, Semiconductors, Scattering
Proceedings Article | 26 May 2022 Poster + Paper
Fast generation of SEM images including charging effect by neural network
Proceedings Volume 12053, 120531Y (2022) https://doi.org/10.1117/12.2613955
KEYWORDS: Scanning electron microscopy, Neural networks, Monte Carlo methods, Sensors, Evolutionary algorithms, Computer simulations, Image processing, Algorithm development, Visibility, Convolutional neural networks
Proceedings Article | 13 March 2018 Paper
Developing a flexible model of electron scattering in solid for charging analysis
Chahn Lee, Toshiyuki Yokosuka, Hideyuki Kazumi
Proceedings Volume 10585, 105852E (2018) https://doi.org/10.1117/12.2297371
KEYWORDS: Scattering, Solids, Diffusion, Clouds, Monte Carlo methods, Scanning electron microscopy, Metals, Copper, Particles, 3D modeling
Proceedings Article | 28 March 2017 Presentation + Paper
SEM image prediction based on modeling of electron-solid interaction
Toshimasa Kameda, Satoshi Takada, Makoto Suzuki, Toshiyuki Yokosuka, Sergey Borisov, Sergey Babin
Proceedings Volume 10145, 101451I (2017) https://doi.org/10.1117/12.2257661
KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Image processing, Crystals, Electrons, Metrology, Inspection, Manufacturing, Scattering, Silica, Selenium, Laser scattering, Semiconductors
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