Terahertz (THz) quantum cascade lasers (QCLs) based on double metal waveguides are compact sources of broadband THz radiation, which can also operate as frequency combs. We present a planarized double metal waveguide THz QCL platform, where the active region is embedded in a low-loss BCB polymer and covered by an extended top metallization. The latter enables placing bonding wires on the sides above the BCB-covered area, hindering the formation of any defects on the active region and enables the fabrication of waveguides with narrow widths below the bonding wire size. This can then be employed as a fundamental mode selection mechanism for comb operation without any side absorbers, and also features improved heat dissipation properties in continuous wave operation. The extended top metallization also enhances the RF properties of the device, as it encompasses a metallic cavity with the global ground plane. Experimentally, we present results on two different device geometries. First is a simple ridge waveguide with a width of 40 μm, narrow enough to act as a mode selection filter. Free-running frequency comb states with bandwidths above 600 GHz and single beatnotes up to -60 dBm are measured. With a strong external RF signal, close to the natural repetition frequency, we can broaden the emission to over 1.4 THz. The second type of device is a tapered waveguide, where the narrow sections act as a transversal mode filter, while the wider ones have lower waveguide losses and provide more gain. Due to a field-enhancement effect in the narrow sections, there is a significant enhancement in the four wave mixing, a third order nonlinear process responsible for comb formation. Free-running devices produce beatnotes close to -30 dBm, three orders of magnitude higher than for ridge devices. Improved comb performance is maintained also for high operating temperatures. A comb bandwidth above 200 GHz and a single beatnote above -60 dBm are measured at 115 K, very close to the maximum lasing temperature of 118 K. Beyond the improved laser and comb performance, the planarized waveguide platform also enables a relatively straightforward co-integration of active and passive elements.
We present a planarized double metal waveguide THz quantum cascade laser, where the top contact metallization extends beyond the active region, above the surrounding low-loss BCB polymer. Placing wire bonds over the BCB-covered area enables the fabrication of extremely narrow waveguide dimensions with reduced power dissipation. Compared to a standard double metal waveguide, improvements in waveguide losses, dispersion, RF and thermal properties are observed. Measurement results feature frequency comb operation with free-running beatnotes as strong as -30 dBm, self-starting harmonic states, RF-driven broadband emission, comb operation up to 110 K, and laser operation up to 118 K in continuous-wave.
Frequency red tuning of GHz-level is shown in THz Quantum Cascade Lasers, by post-processing alteration of the device. It involves changing the height difference between the active region and surrounding medium, and reapplying a material of known refractive index with an appropriate thickness according to simulations. Thus the mode effective refractive index is increased, causing the device to lase at a lower frequency. With the correct material and thickness, shifts down to 1 GHz can be observed.
Recently, on-chip quantum-cascade-laser-based frequency combs are gaining increasing attention both in the Mid-IR and in the THz spectral regions. THz devices offer the possibility of filling the gap of comb sources in a spectral region were no table-top comb is available. I will discuss direct THz comb generation from both homogeneous and heterogeneous quantum cascade lasers. Octave spanning emission spectra and comb operation on bandwidth larger than 1 THz are reported for heterogeneous cascades. I will also report on a series of new structures with homogeneous cascade design that feature a very low threshold current density (< 100 A/cm2), a bandwidth of roughly 1 THz centered a 3 THz and an extremely wide bandwidth (>1.8 THz) when driven in the NDR region. This extremely broadband emission in the NDR is studied as well with NEGF simulation and is based on an interplay between strong photon assisted transport due to the highly diagonal transition and domain formation.These structures are also showing RF injection locking with extremely reduced microwave powers. We will discuss locking experiments as well as a method to finely control the repetition rate of the laser based on controlled optical feedback.
Time resolved spectral measurements aimed to clarify the physics of field domains in the NDR will be also presented.
Recently, on-chip quantum-cascade-laser-based frequency combs are gaining increasing attention both in the Mid-IR and in the THz spectral regions. THz devices offer the possibility of filling the gap of comb sources in a spectral region were no table top comb is available. We report on THz comb emission from homogeneous quantum cascade laser structure with a new active region design. It features a very low threshold current density (< 100 A/cm2), extremely wide bandwidth (>1 THz) extending from 3 THz to 4.2 THz and peculiar broadband behavior in the NDR region suggesting the presence of field domains. Time resolved spectral measurements employing an hot electron bolometer demonstrate the simultaneous lasing of all the modes in the NDR region and beatnote spectroscopy based on self-mixing proves the coherent nature of the broadband laser emission. Active control of the repetition rate is also demonstrated by using an external cavity scheme employing a piezo actuator. This active region is very promising for the future integration in an heterogeneous structure for octave spanning comb operation and also as an homogenous comb device
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