There is an increasing demand for superconducting nanowire single photon detectors (SNSPDs) which combine high efficiency, low dark counts and fast response time. They play a crucial role in developing strategic application areas such as photon-based quantum computing and quantum key distribution. We demonstrate the fabrication of high crystalline quality NbN-based waveguide-integrated SNSPDs using a completely CMOS-compatible process on 200 mm SOI wafers. We achieve a detection efficiency over 80 % at 100 Hz dark count rate, a short decay time below 4 ns and a maximum count rate of 200 MHz.
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