Vladimir V. Zabrodsky
senior researcher at Ioffe Institute
SPIE Involvement:
Author
Area of Expertise:
silicon photodiodes , VUV , metrology , EUV
Publications (2)

SPIE Journal Paper | 21 July 2021 Open Access
Pavel Aruev, Victor P. Belik, Vladimir Zabrodsky, Andrey Nikolaev, Evgeniy Sherstnev
OE, Vol. 60, Issue 07, 077103, (July 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.7.077103
KEYWORDS: Silicon, Sensors, Photodiodes, Vacuum ultraviolet, Photodetectors, Quantum efficiency, Avalanche photodiodes, Absorption, Calibration, Aluminum

Proceedings Article | 3 May 2013 Paper
Vladimir Zabrodsky, Pavel Aruev, Vladimir Filimonov, Nikolay Sobolev, Evgeniy Sherstnev, Viktor Belik, Anton Nikolenko, Denis Ivlyushkin, Valery Pindyurin, Nikita Shadrin, Artem Soldatov, Mikhail Mashkovtsev
Proceedings Volume 8777, 87770R (2013) https://doi.org/10.1117/12.2017478
KEYWORDS: Photodiodes, Silicon, Visualization, Extreme ultraviolet, X-rays, Extreme ultraviolet lithography, Mirrors, Sensors, Silica, Optical filters

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