We study high-power high bit rate single-mode 1550 nm vertical-cavity surface-emitting lasers fabricated using wafer-fusion. The optical cavity was grown on an InP wafer, and the two AlGaAs/GaAs distributed Bragg reflectors were grown on GaAs wafers, all three by molecular-beam epitaxy. The active region is based on thin InGaAs/InAlGaAs quantum wells and a composite InAlGaAs tunnel junction. To confine current and optical radiation, we use a lateral-structured buried tunnel junction with ≈ 6 µm diameter and an etching depth of ≈ 20 nm. These VCSELs demonstrate up to 5 mW single-mode continuous-wave output power and a threshold current of ≈ 2 mA at 25 °C. Even at an ambient temperature of 85 °C, the maximum optical output power is larger than 1 mW. The lasers demonstrate a 34 Gbps non-return-to-zero data transfer rate and 42 Gbps (21 GBaud) using 4-level pulse amplitude modulation at 25 °C back-to-back conditions with ≈ 934 fJ/bit power consumption per bit, which is amongst the lowest values reported for this wavelength range and bit rate.
Sergei Blokhin, Andrey Babichev, Andrey Gladyshev, Innokenty Novikov, Alexey A. Blokhin, Mikhail A. Bobrov, Nikolay Maleev, Vladislav Andryushkin, Dmitrii Denisov, Kirill Voropaev, Victor Ustinov, Vladislav E. Bougrov, Anton Egorov, Leonid Karachinsky
1300-nm vertical-cavity surface-emitting lasers (VCSELs) were fabricated by wafer fusion (WF) technique and studied. The active region based on InGaAs/InAlGaAs superlattice was grown by molecular-beam epitaxy (MBE). Current and optical confinement was provided by composite n ++ -InGaAs / p ++ -InGaAs / p ++ -InAlGaAs buried tunnel junction (BTJ) realized by selective etching and overgrowth by n-InP. AlGaAs/GaAs distributed Bragg reflectors grown by MBE were applied on both sides of the cavity by WF and substrate removal techniques. The devices with BTJ diameter of 5 μm demonstrated a stable single-mode lasing with threshold current <1.3 mA and output optical power >6 mW and operation in a wide temperature range. The measured −3 dB bandwidth was more than 8 GHz at 20°C and about 5.5 GHz at 85°C, the eye diagrams were open with a bit rate up to 20 Gbps using nonreturn-to-zero (NRZ) modulation standard at 20°C. Using 5-tap feedforward equalizer, the NRZ transmission at 25 Gbps was demonstrated up to 5 km single-mode fiber at 20°C. The developed VCSELs represent a platform for further significant performance improvement.
The paper presents the results of the research and development of 1300-nm vertical-cavity surface-emitting lasers, fabricated by wafer fusion technique for hybrid integration of an InAlGaAs/InP optical cavity with two AlGaAs/GaAs distributed Bragg reflectors using molecular-beam epitaxy. The active region is based on InGaAs/InAlGaAs superlattice, while current and optical confinement is provided by n++-InGaAs/p++-InGaAs/p++-InAlGaAs buried tunnel junction (BTJ). The proposed device design results in low internal loss (about 3.2 cm-1 at 20 °C). The devices with BTJ diameter of 5 μm demonstrate a stable single-mode lasing with threshold current less than 1.3 mA and output optical power more than 6 mW and operation in a wide temperature range. The measured -3 dB bandwidth is more than 8 GHz at 20 °C and about 5.5 GHz at 85 °C, the eye diagrams are open with a bit rate up to 20 Gbps using nonreturn-to-zero (NRZ) modulation standard. Using 5-tap feedforward equalizer, the NRZ transmission at 25 Gbps has been demonstrated up to 5km single-mode fiber.
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