Ms. Wendy Li Profile

Wendy Li

at Semiconductor Manufacturing International Corp

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Publications (2)

Proceedings Article | 10 April 2013 Paper

Quantitative CD-SEM resist shrinkage study and its application for accurate CD-SEM tools' matching

Wen Hui Li, Yi Shih Lin, Siyuan Frank Yang, Bo Xiu Cai, Yi Huang

Proceedings Volume 8681, 868128 (2013) https://doi.org/10.1117/12.2011244

KEYWORDS: Data modeling, Critical dimension metrology, Semiconducting wafers, Metrology, Error analysis, Americium, Process control, Statistical analysis, Manufacturing, Signal detection

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Proceedings Article | 10 April 2013 Paper

Characterization of a 'first measurement effect' in CD-SEM measurement

Boxiu Cai, Yi-Shih Lin, Qiang Wu, Yi Huang, Siyuan Yang, Wen-Hui Li, Michael Hao

Proceedings Volume 8681, 868131 (2013) https://doi.org/10.1117/12.2010942

KEYWORDS: Scanning electron microscopy, Critical dimension metrology, Metrology, Line edge roughness, Physics, Time metrology, Semiconducting wafers, Control systems, Semiconductors, Image acquisition

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