Spectral confocal displacement sensor is a high-precision, non-contact displacement sensor, which can be used to measure the surface morphology, thickness and distance. In this paper, the basic principle of spectral confocal displacement measurement is discussed, and a global lens group is designed by using CODEV optical design software. The design method of spectral confocal displacement sensor lens group and aberration analysis are given. The measurement range of the lens group is 2mm, the image space numerical aperture is 0.3, the axial response FWHM is better than 5um, and the resolution is higher. The linear regression analysis shows that the determination coefficient between wavelength and displacement is better than 0.9, and the linear relationship between displacement and wavelength is good.
Chromatic confocal displacement sensor is one of non-contact displacement sensors based on optical wavelength displacement modulation. It is also a new photoelectric displacement sensor with high accuracy and stability which used to measure surface topography, distance, thickness and so on. In this paper, a hyperchromatic lens with the measurement range of 1mm is designed by using CODE V optical design software. The mentality of designing of hyperchromatic lens are researched according to the conditions of linear longitudinal chromatic aberration. Meanwhile the importance of image space numerical aperture (NA) and linearity of the longitudinal chromatic aberration to the sensor are clarified. In the final design of hyperchromatic lens, we realized the image space NA of 0.4436 and the linear regression coefficient R2 of 0.991 taking into account both linear longitudinal chromatic aberration and image space NA.
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