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Wiebke Schöttler
at FRT GmbH
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Publications (1)
Proceedings Article | 10 August 2023 Presentation + Paper
Experimental study and modelling of high aspect ratio through silicon vias (TSVs)
Wiebke Schöttler, Matthias Meyer, Alejandro Avellán
Proceedings Volume 12619, 126190J (2023) https://doi.org/10.1117/12.2674983
KEYWORDS: Reflection, Gaussian beams, Beam diameter, Silicon, Plane waves, Optical simulations, Electric fields, Sensors, Electro optical modeling, Critical dimension metrology
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