Wilhelm Eschen
at Friedrich-Schiller-Univ Jena
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 March 2024 Poster + Paper
L. Licht, C. Liu, W. Eschen, D. Penagos Molina, J. Reinhard, S. Kaleta, J. Limpert, C. Eggeling, J. Rothhardt
Proceedings Volume 12857, 128570I (2024) https://doi.org/10.1117/12.3002264
KEYWORDS: Extreme ultraviolet, Fluorescence, Infrared imaging, Biological samples, Fluorescence microscopy, Biological imaging, Light sources and illumination, Microscopy, Image resolution, Visible radiation

Proceedings Article | 9 August 2023 Paper
J. Rothhardt, Wilhelm Eschen, Cheng Liu, Daniel Penagos M., Robert Klas, Jens Limpert
Proceedings Volume 12621, 126210V (2023) https://doi.org/10.1117/12.2678398
KEYWORDS: Extreme ultraviolet, Scattering, Biological samples, Biological imaging, Microscopes, Silicon, Integrated circuits, Chemical composition, Stars, Semiconductors

Proceedings Article | 11 November 2022 Presentation
Wilhelm Eschen, Lars Loetgering, Vittoria Schuster, Robert Klas, Alexander Kirsche, Lutz Berthold, Michael Steinert, Thomas Pertsch, Michael Krause, Jens Limpert, Jan Rothhardt
Proceedings Volume PC12292, PC122920O (2022) https://doi.org/10.1117/12.2641705
KEYWORDS: Extreme ultraviolet, Microscopy, Ultraviolet radiation, Stars, Silicon, Silica, Scattering, Refractive index, Microscopes, Metrology

Proceedings Article | 5 March 2021 Paper
Proceedings Volume 11676, 116761B (2021) https://doi.org/10.1117/12.2578527
KEYWORDS: Coherence imaging, Extreme ultraviolet, Ultrafast imaging, Synchrotrons, Spatial resolution, Photomasks, Lithography, Temporal resolution, Temporal coherence, Metrology

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