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William Ethan Maguire
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Publications (4)
Proceedings Article | 10 April 2024 Poster + Paper
Genetic optimization of aperiodic multilayer masks for high and hyper-NA EUV lithography
Proceedings Volume 12953, 129531A (2024) https://doi.org/10.1117/12.3010983
KEYWORDS: Reflectivity, Photomasks, Reflection, Polarization, Extreme ultraviolet lithography, Apodization, Multilayers, Extreme ultraviolet, Silicon
Proceedings Article | 28 April 2023 Presentation + Paper
Modeling and verification of next-gen EUV mask absorbers
Proceedings Volume 12494, 124940H (2023) https://doi.org/10.1117/12.2660823
KEYWORDS: Refractive index, Systems modeling, Extreme ultraviolet, Phase shifts, Composites, Modeling, Dielectrics, Phase shifting, Lithography, EUV optics, 3D mask effects
Proceedings Article | 28 April 2023 Presentation + Paper
Defining Tatian-Zernike polynomials for use in a lithography simulator
Proceedings Volume 12494, 124940P (2023) https://doi.org/10.1117/12.2660861
KEYWORDS: Wavefronts, Wavefront errors, Lenses, Lithography, Zernike polynomials, Singular value decomposition, Monochromatic aberrations, Simulations, Wavefront aberrations, Optical aberrations
Proceedings Article | 28 April 2023 Paper
Modelling of patterning impact from diffraction hot spots in high-NA EUV lenses
Proceedings Volume 12494, 124941E (2023) https://doi.org/10.1117/12.2658756
KEYWORDS: Diffraction, Extreme ultraviolet, Modeling, Systems modeling, Lenses, Diffusion, Reflectivity, Source mask optimization, Optical lithography, Nanoimprint lithography
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