Dr. Won Chegal Profile

Dr. Won Chegal

PhD at Korea Research Institute of Standards and Science

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Author

Publications (12)

Proceedings Article | 12 November 2024 Paper

Performance testing system for extreme ultraviolet lithography components

Wooram Kim, Eunseok Choe, Do-Yeon Hwang, Sangwoo Kang, Won Chegal, Jung-Hyung Kim

Proceedings Volume 13215, 132150W (2024) https://doi.org/10.1117/12.3033688

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Photoresist materials, Optical properties, Mirrors, Pellicles, Vacuum chambers, Transmittance, Reflectivity

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Proceedings Article | 10 April 2024 Presentation + Paper

High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer

S. Choi, G. Hwang, S. Kheiryzadehkhanghah, I. Choi, W. Chegal, Y. Cho, D. Kim

Proceedings Volume 12955, 129550F (2024) https://doi.org/10.1117/12.3010995

KEYWORDS: 2D materials, Inspection, Imaging systems, Visualization, Spatial resolution, Metrology

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Proceedings Article | 10 August 2023 Poster

Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer

Yong Jai Cho, Won Chegal, Junho Choi

Proceedings Volume PC12619, PC126190D (2023) https://doi.org/10.1117/12.2673375

KEYWORDS: Measurement uncertainty, Thin films, Film thickness, Silica, Refractive index, Spectroscopy, Standards development, Semiconductors, Semiconductor manufacturing, Quality control

Proceedings Article | 22 June 2023 Poster

A Bayer mosaic pixel type image sensor with attached plasmonic microfilter towards multispectral imaging

Jiyeon Jeon, Byong Sun Chun, Hakseong Kim, Yeeun Na, Won Chegal, Deok-Kee Kim, Sang Jun Lee

Proceedings Volume PC12519, PC125190G (2023) https://doi.org/10.1117/12.2663243

KEYWORDS: Plasmonics, Multispectral imaging, Image sensors, Nanostructures, Infrared radiation, Wave propagation, Transmittance, Surface plasmons, Superlattices, Plasmons

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Proceedings Article | 13 September 2011 Paper

Kinetic analysis of biomolecular interactions by surface plasmon enhanced ellipsometry

Hyun Mo Cho, Won Chegal, Yong Jai Cho, Jong Myoung Won, Hak Min Lee, Jae Heung Jo

Proceedings Volume 8099, 80990U (2011) https://doi.org/10.1117/12.892309

KEYWORDS: Sensors, Ellipsometry, Refractive index, Phase measurement, Biological research, Biosensors, Gold, Metals, Surface plasmons, Calibration

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Proceedings Article | 17 November 2005 Paper

Imaging ellipsometry combined with surface plasmon resonance for real-time biospecific interaction analysis

Won Chegal, Hyun Mo Cho, Yong Jai Cho, Young Pil Kim, Hak Sung Kim

Proceedings Volume 6008, 60081G (2005) https://doi.org/10.1117/12.630448

KEYWORDS: Ellipsometry, Surface plasmons, Reflection, Sensors, Gold, Glasses, Refractive index, Biological research, Prisms, Thin films

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Proceedings Article | 17 November 2005 Paper

Enhancement of biomolecular detection sensitivity by surface plasmon resonance ellipsometry

Hyun Mo Cho, Won Chegal, Yong Jai Cho, Young-pil Kim, Hak-sung Kim

Proceedings Volume 6008, 60081F (2005) https://doi.org/10.1117/12.630379

KEYWORDS: Ellipsometry, Gold, Phase measurement, Refractive index, Data modeling, Surface plasmons, Imaging systems, Chromium, Thin films, Prisms

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Proceedings Article | 14 February 2005 Paper

Fast data acquisition in imaging ellipsometry using four-frame method

Won Chegal, Yong Jai Cho, Hyun Mo Cho, Yun Woo Lee, Soo Hyun Kim

Proceedings Volume 5634, (2005) https://doi.org/10.1117/12.576807

KEYWORDS: Ellipsometry, Time metrology, Spectrographs, Fourier transforms, Imaging spectroscopy, Polarization, Polarizers, Spectroscopy, Sensors, Thin films

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Proceedings Article | 15 October 2004 Paper

Azimuth calibration method in ellipsometer with imaging spectrograph

Won Chegal, Yong Jai Cho, Hyun Jong Kim, Hyun Mo Cho, Yun Woo Lee, Soo Hyun Kim

Proceedings Volume 5546, (2004) https://doi.org/10.1117/12.559382

KEYWORDS: Spectrographs, Calibration, Imaging spectroscopy, Ellipsometry, Sensors, Polarization, Signal detection, Optical testing, Spectroscopy, Thin films

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Proceedings Article | 14 October 2004 Paper

Determination of optical properties of titanium dioxide thin films on different substrates by using spectroscopic ellipsometry

Hyun Jong Kim, Yong Jai Cho, Hyun Mo Cho, Won Chegal, Yun Woo Lee, Sang Youl Kim

Proceedings Volume 5538, (2004) https://doi.org/10.1117/12.559427

KEYWORDS: Refractive index, Thin films, Silicon, Silicon films, Optical properties, Crystals, Spectroscopic ellipsometry, Dispersion, Thin film growth, Titanium dioxide

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Proceedings Article | 8 May 2001 Paper

Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)

Dae Kim, Jang You, Soo Hyun Kim, Hong-Jin Kong, Yun Woo Lee, Won Chegal, Yoon Keun Kwak

Proceedings Volume 4416, (2001) https://doi.org/10.1117/12.427049

KEYWORDS: Fourier transforms, Acousto-optics, Tunable filters, Near infrared, Crystals, Spectroscopy, Optical fibers, Acoustics, Transmittance, Imaging spectroscopy

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Proceedings Article | 8 May 2001 Paper

In-situ single-wavelength ellipsometer for a vacuum chamber

Won Chegal, Sangheon Ye, Hyun-Mo Cho, Yoonwoo Lee, Soo Hyun Kim, Yoon Keun Kwak

Proceedings Volume 4416, (2001) https://doi.org/10.1117/12.426993

KEYWORDS: Calibration, Polarizers, Thin films, Silicon, Semiconducting wafers, Thin film deposition, Silver, Analytical research, Nickel, Silicon films

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Showing 5 of 12 publications

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