A fiber-optic relative-humidity sensor composed of two silver coating and a thick porous silicon film is proposed and
demonstrated for relative humidity sensing. The two Ag coatings are magnetically sputtered, with porous silicon
membrane sandwiched in between, which constructs a low-fineness Fabry-Perot sensing head. Experimental results show
that the interference fringe of the proposed porous silicon Fabry-Perot sensor shifts by 10.3 nm when relative humidity
increases from 11% to 97%. The linearity of interference fringe shift to relative humidity is averagely 0.9764 below 85%
RH. The proposed sensor is suitable for relative humidity sensing in the ambient environment.
A novel optical fiber humidity sensor using polyvinylidene fluoride (PVDF) as sensitive material was proposed in this paper. Three-layer coating was deposited on the end-face of optical fiber, which constructs an extrinsic Fabry-Perot (F-P) interference structure. Ag layer deposited by DC magnetron sputtering was used as mirror layer in the F-P interference structure. PVDF layer was realized with Czochralski method as F-P cavity. Simulation was performed using data fitting to analysis the relevant parameters on sensor performance. Experimental result shows the interference fringe shifts to longer wavelength when relative humidity increases. The fringe shifted 2.4nm with a good linearity response when relative humidity increases from 11% to 97%. The linearity of interference fringe shift to relative humidity was 0.98415, the response time was less than 1min.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.