This paper investigates the feasibility of measuring surface form of cylindrical optics using non-contact multiwavelength interferometry. Two plano-convex lenses, one with an acylindrical prescription and the other with a cylindrical prescription were measured on a non-contact multiwavelength interferometer and their surface form error was evaluated. To corroborate the results obtained from this, the two lenses were measured on a contact type PGI (phase grating interferometer) gauge, and the peak-to-valley (PV), root mean square (RMS), and radius of curvature (RoC) parameters were quantified to compare the 3D height maps obtained from these two different measurement methods. It is shown that there is a good agreement between the multiwavelength interferometer and PGI gauge and the key differences including measurement setup and cycle time between the two methods are discussed.
Freeform optical components are increasingly demanded by optical manufacturers and researchers, and are always a challenging topic for metrologists. Form errors of the freeform surfaces resulting from the manufacturing process are critical, in terms of the functionality and reliability of the freeform optics. This paper presents two methodology case studies of off-axis aspheric optics using contact profilometry and non-contact scanning point interferometry. The contact method is accomplished by use of an ultra-low noise measurement platform, combined with a patented phase grating interferometry (PGI) technology and specially developed algorithms for calibration and analysis. The study shows the capability of the proposed method for high tangential slope freeform measurement. This slope measurement capability of PGI Freeform, together with its large gauge range, enables 3D form measurements for most freeform surfaces. However, for some optical surfaces non-contact measurement is preferred due to the possible surface damage caused by the stylus force of contact method. Non-contact scanning metrology is based on a patented multi-wavelength interferometry (MWLI) technology. It provides high density 3D data in short measurement times at a highly reproducible form measurement accuracy. The long-range absolute measurement capability of the MWLI sensor, together with its ultraprecision metrology platform and improved calibration routine through which the sensor accurately follows the designed shape of optical surfaces, enables precise 3D freeform surface measurements within its tangential slope measurement range.
The near optical coaxial phase measuring deflectometry (NCPMD) is one of the phase measuring deflectometry (PDM) techniques which is typically used for specular surface form measurement. The NCPMD utilizing a plate beamsplitter to folding the optical axis of display screen to make it close to the optical axis of the imaging system which makes the system more compact and has significantly reduced volume compared with the traditional PMD configuration. The NCPDM can achieve compact configuration, light weight, and reduce measurement error caused by structure shadows of the off-axis configuration of traditional PDM. However, the plate beamsplitter will lead measurement errors to the NCPMD system due to the beamsplitter will inevitably inherited certain form errors on the two surfaces during manufacturing process. In this paper, a reflection error model of the NCPMD system is proposed, and the measurement error caused by the reflection effect of the plate beamsplitter is determined by considering the influence of the unevenness of the upper and lower surfaces of the plate beamsplitter. Simulation studies show that the proposed reflection model can accurately determine the measurement errors caused by the form errors of the beamsplitter, which can be effectively used for subsequent error compensation.
Advanced metrology plays an important role in the research, production and quality control of optical components. With
surface finish, form error and other parameter specifications becoming more stringent, precision measurements are
increasingly demanded by optics manufacturers and users. The modern metrologist now has both contact and noncontact
measurement solutions available and a combination of these techniques now provides a more detailed
understanding of optical components. Phase Grating Interferometry (PGI) with sub-nanometre vertical resolution and
sub-micron lateral resolution can provide detailed characterization of a wide range of components including shallow and
steep-sided optics. PGI is ideal for precision form measurement of a comprehensive range of lenses, moulds and other
spherical or aspheric products. Because of the complex nature of these components, especially precision aspheric and
asphero-diffractive optics, control of the form is vital to ensure they perform correctly. Recent hardware and software
developments now make it possible to gain a better understanding and control of the form and function of this optics.
Another change is the use of high speed 3D non-contact measurement of optics which is becoming more popular. Often
scanning interferometric techniques such as coherence correlation interferometry (CCI) can be used to study components
not suited to 2D contact analysis, including fragile surfaces and structured surfaces. Scanning interferometry can also be
used to measure film thickness and uniformity of any coating present. In this paper the use of both PGI and CCI to
measure optical lenses and coatings is discussed.
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