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Yanyan Yang
at Huazhong Univ of Science and Technology
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Publications (1)
Proceedings Article | 13 October 2009 Paper
Effects of substrate temperature on properties of the aluminum-doped zinc oxide thin films deposited by RF magnetron sputtering
Yanyan Yang, Xiangbin Zeng
Proceedings Volume 7518, 751808 (2009) https://doi.org/10.1117/12.843507
KEYWORDS: Sputter deposition, Crystals, Zinc oxide, Temperature metrology, Thin films, Transmittance, Solar cells, Glasses, Scanning electron microscopy, Diffraction
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