Mr. Yukihiro Sato Profile

Yukihiro Sato

at Fujitsu Ltd

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Author

Publications (2)

Proceedings Article | 9 November 2005 Paper

Noble development system to achieve defect-free process for 65nm node photomasks

Hironori Sasaki, Shuichi Sanki, Ryugo Hikichi, Kiyoshi Ogawa, Akihiko Naito, Yukihiro Sato, Yasuyuki Kushida, Naoyuki Ishiwata, Hiroshi Maruyama

Proceedings Volume 5992, 59920M (2005) https://doi.org/10.1117/12.633668

KEYWORDS: Opacity, Photomasks, Photoresist processing, Inspection, Defect inspection, Dry etching, Semiconductors, Manufacturing, Scanning electron microscopy, Lithography

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Proceedings Article | 27 December 2002 Paper

Process bias control with thin Cr film blanks for 90-nm-node reticle fabrication

Yukihiro Sato, Hitoshi Handa, Yasuyuki Kushida, Satoru Asai, Hiroshi Maruyama, Yutaka Miyahara, Minoru Naito, Ryugo Hikichi, Yoji Kawasaki, Hiroyuki Miyashita, Shigeru Noguchi

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467497

KEYWORDS: Etching, Chromium, Reticles, Thin films, Dry etching, Critical dimension metrology, Lithography, Semiconducting wafers, Process control, Control systems

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