Currently we are developing a VB grating for an echelle grism of the Subaru Multi-Object InfraRed Camera and Spectograph (MOIRCS) and a VB grating for the Advanced Lunar Imaging Spectrometer (ALIS) of the Lunar Polar Exploration Mission (LUPEX). The shapes of gratings are optimized to achieve high diffraction efficiency and a wide spectral bandwidth by performing numerical calculations of the rigorous coupled wave analysis (RCWA). Based on the calculated results, we are developing variety of gratings using MEMS technologies. In addition, we have deployed new high-dispersion grisms of J and H band of MOIRCS with transmission gratings fabricated by LightSmyth. The transmission grating is kind of a VB grating which ridges are composed by three kinds of dielectric layers.
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