Mr. Zhengguo Tian Profile

Zhengguo Tian

at YMTC

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Publications (2)

Proceedings Article | 28 March 2017 Paper

New alignment mark design structures for higher diffraction order wafer quality enhancement

Libin Zhang, Yaobin Feng, Lisong Dong, Xiaojing Su, Zhengguo Tian, Chao Fang, Yayi Wei, Tianchun Ye

Proceedings Volume 10145, 101452C (2017) https://doi.org/10.1117/12.2257627

KEYWORDS: Optical alignment, Diffraction, Semiconducting wafers, Structural design, Overlay metrology, Optical design, Diffraction gratings, Interfaces, Process control, Manufacturing, Scanners, Oxides, Lithography, Absorption

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SPIE Journal Paper | 23 November 2015

Efficient source mask optimization method for reduction of computational lithography cycles and enhancement of process-window predictability

Moran Guo, Zhiyang Song, Yaobin Feng, Zhengguo Tian, Qingchen Cao, Yayi Wei

JM3, Vol. 14, Issue 04, 043507, (November 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.4.043507

KEYWORDS: Electroluminescence, Source mask optimization, Photomasks, Optical proximity correction, Computational lithography, Diffractive optical elements, Metals, Lithography, Manufacturing, Optimization (mathematics)

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