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Dr. Zhongwei Zhang
at Henan Univ. of Technology
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Publications (1)
Proceedings Article | 5 November 2020 Paper
Analysis of wear non-uniformity of pad in full aperture polishing
Xinxing Ban, Hongyu Zhu, Zhongwei Zhang, Zongyao Liu, Huiying Zhao, Xueliang Zhu
Proceedings Volume 11568, 115680F (2020) https://doi.org/10.1117/12.2575736
KEYWORDS: Polishing, Semiconducting wafers, Surface finishing, Particles, Polyurethane, Motion models, Optics manufacturing, Optical components, Kinematics, Laser development
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