The correlation between the process parameters of auxiliary ion source and the SiO2 film stress was systematically studied using dual-ion-sputtering deposition. Spectrophotometer and ellipsometer were used to measure the SiO2 film’s transmittance spectrum and reflection ellipsometry. The refractive index and thickness of SiO2 film were obtained by total spectrum inversion calculation. The laser interferometer measures the substrate surface shape to obtain film stress. The experimental result shows that film stress is related to sputtering energy during deposition, high-energy oxygen ion assisted deposition can significantly reduce it and the assisted ion beam voltage plays an important role in controlling it by data normalization analysis. Ultra-low stress high reflective film was prepared by dual-ion-beam sputtering deposition, where stress was 70% lower than traditional film. At the same time, this film can ensure sufficiently high optical quality to keep it reliable and stable in high-precision laser systems.
SiO2 is a very important low refractive index film material that can operate in the UV to mid-IR regions. The SiO2 films used were deposited on Si substrates by different deposition techniques. We designed and manufactured a high-temperature infrared spectrum measuring equipment connected with a Fourier transform infrared (FTIR) spectrometer; the measuring temperature could range from room-temperature to 600°C. The FTIR transmission spectra of SiO2 films under different working temperatures were measured in the wavenumber region from 4000 to 400 cm − 1. From the measured spectra, it can be seen that IBS-SiO2 and IAD-SiO2 films are more stable and operating temperature can reach 400°C. EB-SiO2 film is worse and operating temperature is only 300°C. Complex dielectric functions of SiO2 films under different temperature conditions were calculated from FTIR transmittance spectra, and the best fitted method was obtained for calculating optical constants of dielectric materials in the high temperature condition. The results show that the structure of the Si-O-Si network in IBS-SiO2 films was the most stable structure. The experimental results were of great significance to practical application.
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