Dr. Amyn A. Poonawala Profile

Dr. Amyn A. Poonawala

R&D Engineer

SPIE Involvement:

Author

Area of Expertise:

ILT (Inverse Lithography Technology) , Mask Synthesis

Publications (4)

Proceedings Article | 22 March 2021 Presentation + Paper

Machine learning ILT for memory customers

Thomas Cecil, Kyle Braam, Ahmed Omran, Amyn Poonawala, Jason Shu, Clark Vandam

Proceedings Volume 11613, 116130P (2021) https://doi.org/10.1117/12.2587107

KEYWORDS: Machine learning, Visualization, Optical proximity correction, Neural networks

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Proceedings Article | 23 March 2020 Presentation + Paper

Establishing fast, practical, full-chip ILT flows using machine learning

Thomas Cecil, Kyle Braam, Ahmed Omran, Amyn Poonawala, Jason Shu, Clark Vandam

Proceedings Volume 11327, 1132706 (2020) https://doi.org/10.1117/12.2551425

KEYWORDS: Data modeling, Photomasks, Lithography, Machine learning, Optical proximity correction, Convolution, Network architectures, Inverse problems, Calibration

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Proceedings Article | 30 September 2009 Paper

Model-based assist feature placement for 32nm and 22nm technology nodes using inverse mask technology

Amyn Poonawala, Benjamin Painter, Chip Kerchner

Proceedings Volume 7488, 748814 (2009) https://doi.org/10.1117/12.829717

KEYWORDS: Atrial fibrillation, Photomasks, Optical proximity correction, Imaging systems, Data modeling, Manufacturing, Printing, Lithography, Optimization (mathematics), Mathematical modeling

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Proceedings Article | 16 March 2009 Paper

Integrating assist feature print fixing with OPC

Levi Barnes, Amyn Poonawala, Benjamin Painter, Andrew Jost, TJ Takei, Yong Li

Proceedings Volume 7274, 727413 (2009) https://doi.org/10.1117/12.815171

KEYWORDS: Atrial fibrillation, Optical proximity correction, Printing, 3D modeling, Photomasks, Process modeling, Data modeling, Model-based design, Solids, Optical lithography

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