Using Hartmann-Shack (H-S) wave-front sensor to test lenses with high numerical aperture, the reference spherical
wave-front from pinhole is used to calibrate the Hartmann sensor to improve the precision of calibration, but intensity
uniformity of the reference spherical wave-front affects the precision of Hartmann sensor’s calibration. Based on the
vector diffraction theory, intensity uniformity is calculated with finite-difference time-domain method in case of a
converging Gaussian incident visible light on pinhole. In order to proof the correctness of the intensity model of pinhole
vector diffraction, experimentation of intensity is performed in visible-light. When the pinhole is the material aluminum
with thickness 200nm and pinhole diameter 500nm, the absolute error of intensity uniformity is about 2.57% and 2.31%
within 0.75 NA and 0.5 NA of diffracted wave-front by comparing experiment result with simulation result, so the
intensity model is accurate.
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