MEMs Switches

Microelectromechanical system switching isolation amplifier for low frequency measurement

[+] Author Affiliations
Miao Lu, Zhengping Zhao

XiDian University, China

Xiaodong Hu, Xuefeng Zou, Hejun Guo

Hebei Semiconductor Research Institute, China E-mail: lumiao@vip.sina.com

J. Micro/Nanolith. MEMS MOEMS. 3(3), 467-471 (Jul 01, 2004). doi:10.1117/1.1758950
History: Received Jan. 9, 2003; Accepted Oct. 17, 2003; Online July 19, 2004
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A microelectromechanical systems (MEMS) isolation amplifier is presented, which uses MEMS switches to realize a “flying capacitor” structure. This isolation amplifier has the advantages of simple circuit structures, smaller dimensions, low cost, excellent electromagnetic compatibility (EMC) performance, easy to make multichannel isolation circuits, integration compatibility with on-chip electronics, etc. The performance of the MEMS switch exhibits 30-V pull-in voltage, 35-μs time delay, and 110-V breakdown voltage. The preliminary performance of the isolation amplifier is also demonstrated. To our knowledge, this work presents the first MEMS isolation amplifier structure. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Miao Lu ; Zhengping Zhao ; Xiaodong Hu ; Xuefeng Zou and Hejun Guo
"Microelectromechanical system switching isolation amplifier for low frequency measurement", J. Micro/Nanolith. MEMS MOEMS. 3(3), 467-471 (Jul 01, 2004). ; http://dx.doi.org/10.1117/1.1758950


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