Articles

Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer

[+] Author Affiliations
Deng-Huei Hwang

NeoStones Microfabrication Corporation, Research and Development Center, HsinChu, Taiwan

Kan-Ping Chin

National Chiao Tung University, Department of Mechanical Engineering, Taiwan

Yi-Chung Lo

National Synchrotron Radiation Research Center, HsinChu, 30077, Taiwan

Wensyang Hsu

National Chiao Tung University, Department of Mechanical Engineering, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 4(3), 033009 (August 19, 2005). doi:10.1117/1.2037070
History: Received November 15, 2004; Revised February 23, 2005; Accepted February 25, 2005; Published August 19, 2005
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An accelerometer with concise structure having a resonant microbeam to measure 2-D acceleration is proposed. This structure is configured with a central proof mass suspended by four symmetrical and orthogonal high-aspect-ratio (HAR) microbeams. This dual-axis design is able to decouple a two-axis signal from a 2-D acceleration. An analytical model relating the linear relationship between the acceleration and the associated resonant frequency shift of microbeam is derived, and a finite element analysis (FEA) is also performed to confirm this model. The FEA result also shows that there is little cross talk between x and y directions of measurement, meaning that this structure is able to decouple a planar 2-D acceleration into two independent acceleration components, and therefore the 1-D analytical model can be used to evaluate the 2-D acceleration on the x-y plane. In addition, the model is verified by testing results of one conventional dual-axis natural frequency shifted microaccelerometer (DFSM). The simulation result also shows that the sensitivity of the proposed HAR accelerometer is triple that of a conventional DFSM.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Deng-Huei Hwang ; Kan-Ping Chin ; Yi-Chung Lo and Wensyang Hsu
"Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer", J. Micro/Nanolith. MEMS MOEMS. 4(3), 033009 (August 19, 2005). ; http://dx.doi.org/10.1117/1.2037070


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