SPECIAL SECTION ON MOEMS Design, Technology, and Applications Microlithography and Processing

Synergy of contact and noncontact techniques for design and characterization of vibrating MOEMS elements

[+] Author Affiliations
Vytautas Ostasevicius

Kaunas University of Technology, International Studies Center, A. Mickeviciaus 37, Kaunas, LT-44245, Lithuania

Sigitas Tamulevicius

Kaunas University of Technology, Institute of Physical Electronics, Savanoriu pr. 271, LT-50131 Kaunas, Lithuania

Arvydas Palevicius

Kaunas University of Technology, International Studies Center, A. Mickeviciaus 37, Kaunas, LT-44245, Lithuania

Minvydas Ragulskis

Kaunas University of Technology, Department of Mathematical Research in Systems, Studentu 50, LT-51368, Kaunas, Lithuania

Viktoras Grigaliunas

Kaunas University of Technology, Institute of Physical Electronics, Savanoriu pr. 271, LT-50131 Kaunas, Lithuania

Virgilijus Minialga

Kaunas University of Technology, Department of Physics, Studentu 50, LT-51368, Kaunas, Lithuania

J. Micro/Nanolith. MEMS MOEMS. 4(4), 041602 (October 07, 2005). doi:10.1117/1.2107427
History: Received September 30, 2004; Revised June 09, 2005; Accepted July 13, 2005; Published October 07, 2005
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The investigation of dynamics of microelectromechanical systems (MEMS) and microoptoelectromechanical systems (MOEMS) is an important problem of engineering, technology, and metrology. Specifically, recent interest in applying MOEMS technology to the miniaturization of micromirrors, sensors, and actuators for variety of applications requires the design of appropriate testing and measurement tools for investigation of dynamic properties of those systems. Though MOEMS technology offers great promise in addressing the need for smaller dynamical systems, the development of new types of MOEMS structures is a very costly and complicated procedure. On the other hand, straight application of the principles of design of macromechanical systems is rather limited in MOEMS applications. Therefore, the application of measurement technologies capable of detecting the dynamic properties of microscale systems may help to understand and evaluate the functionality of the systems. Technological aspects of MOEMS design and methods of their characterization are presented.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Vytautas Ostasevicius ; Sigitas Tamulevicius ; Arvydas Palevicius ; Minvydas Ragulskis ; Viktoras Grigaliunas, et al.
"Synergy of contact and noncontact techniques for design and characterization of vibrating MOEMS elements", J. Micro/Nanolith. MEMS MOEMS. 4(4), 041602 (October 07, 2005). ; http://dx.doi.org/10.1117/1.2107427


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